| |
| Thesis Name: |
Mesoporous silicates prepared using preorganized templates in supercritical fluids. |
| Usage: |
Mesoporous silicates |
| Keyword: |
Mesoporous silicates |
| Remarks: |
Well-ordered mesoporous silicate films were prepared by infusion and selective condensation of silicon alkoxides within microphase-separated block copolymer templates dilated with supercritical carbon dioxide. Confinement of metal oxide deposition to specific subdomains of the preorganized template yields high-fidelity, three-dimensional replication of the copolymer morphology, enabling the preparation of structures with multiscale order in a process that closely resembles biomineralization. Ordered mesoporous silicate films were synthesized with dielectric constants as low as 1.8 and excellent mechanical properties. The films survive the chemical-mechanical polishing step required for device manufacturing. |
| Original file: |
No File
|
|
Promulgator Detail |
| Full name: |
hichem |
| Country: |
CN |
| City: |
|
| Company Name: |
hichem |
| Homepage: |
http://www.teloon.com |
| E-mail: |
reply |
| Phone: |
86-411-82819585 |
| Fax: |
86-411-82819612 |
| Company Address: |
Renming Road, Dalian city, Lianning pro,china |
| Zip/Postal Code: |
|
| Introduction: |
|
|
|
|
|